Solar cell manufacturing equipment (CVD equipment for Si-based and CIGS-based solar cell production)
Equipment capable of producing microcrystalline SiC solar cells using high-frequency plasma CVD and hot wire CVD methods.
This device is capable of producing microcrystalline SiC solar cells using high-frequency plasma CVD and hot wire CVD methods. It consists of a total of five chambers: three thin film deposition chambers, a sample transport robot chamber, and a sample stock chamber, allowing for the separate formation of the i-layer, which is the light-absorbing layer in the solar cell, and the pn layers.
- 企業：北野精機
- 価格：Other
